Today the silicon based Micro Electro-Mechanical Systems (MEMS) industry
has inadequate development methodologies and frameworks. This is especially
true when developing MEMS process and design Intellectual Property
(IP). The existing development methods and frameworks are not accommodating
for the necessary areas and components required for efficient, reproducible
and controlled MEMS IP development. As such issues have not been
addressed, this results in e.g. unresolved development methodology questions
and non-systematic storage of product deliverables.
This thesis proposes a systematic development approach to tackle several
of such insufficiencies. It proposes a novel MEMS IP development methodology
guiding the developments from a product idea to a marketable product.
Because the business processes of the method require tool support, a quality
integrated Product Engineering Framework is proposed supporting the key areas.
The thesis describes a new framework concept of business process components
supporting the methodology and establishes processes guiding through
the development efforts.
A major focus is set on the in-depth research of reproducibility and control
aspects of the process IP development efforts. The findings concerning process
development tracking are converted into novel concepts for supporting tools
and the newly implemented software environment to address the found problem
areas is introduced. The thesis presents results generated during the EU
FP6 project PROMENADE [Eur04] and previous works. The software environment
developed by the PROMENADE project builds a major cornerstone of a
company wide framework for developing silicon based MEMS IP modules.