Leith, Stewart: Development of novel superconducting thin films for use in superconducting radio frequency cavities. 2021
Inhalt
- Title page
- Zusammenfassung
- Abstract
- Acknowledgements
- Preface
- Table of Contents
- List of Tables
- List of Figures
- List of Symbols
- 1. Introduction
- 2. Superconductivity
- 2.1 Introduction
- 2.2 Critical Temperature and the Meissner Effect
- 2.3 Superconductivity Theory
- 2.4 Type-I and Type-II Superconductors
- 2.5 The Superheating Field
- 2.6 Surface Resistance
- 3. Radio Frequency (RF) Cavities
- 4. The Art of Sputtering
- 4.1 Introduction
- 4.2 Plasma Generation
- 4.3 Sputtering
- 4.4 Thin Film Deposition
- 4.5 Internal Stresses in Thin Films
- 5. Copper Surface Preparation
- 5.1 Introduction
- 5.2 Mechanical Polishing
- 5.3 Chemical Polishing
- 5.4 Electropolishing (EP)
- 5.5 Surface Treatment Studies
- 5.6 QPR Sample Surface Treatment Study
- 5.7 Conclusions
- 6. Experimental Methods
- 7. Deposition of Niobium Nitride (NbN) Thin Films
- 7.1 Target Poisoning
- 7.2 Reactive DC Magnetron Sputtering (R-DC MS) NbN Thin Films on Copper
- 7.3 Reactive High Power Impulse Magnetron Sputtering (R-HiPIMS) NbN Thin Films on Copper
- 7.4 Conclusions
- 8. Deposition of Niobium (Nb) Thin films
- 9. Deposition of Superconductor-Insulator-Superconductor (SIS) Thin Film Coatings
- 9.1 AlN Insulating Layer Investigation
- 9.2 DC MS Nb and NbN SIS Films
- 9.3 HiPIMS Nb and DC MS NbN SIS Films
- 9.4 HiPIMS Nb and NbN SIS Films
- 9.5 Multilayer QPR Samples
- 9.6 Conclusions
- 10. Summary and Future Developments
- 11. References
- Supplementary Information