Chanbai, Sirichanok: Development of a confocal line scanning sensor. 2012
Inhalt
- Zusammenfassung
- Abstract
- Acknowledgments
- Table of Contents
- Symbols and Acronyms
- Introduction
- Background of Confocal Microscopy
- The advent of Confocal Microscopy (CM)
- The evolution of the Nipkow disk based confocal microscopes
- The pinhole disk based confocal microscope
- Optical resolution
- Surface inspection application
- Conclusion
- Theory of the Confocal Line Scanning Sensor (CLSS)
- System overview
- Keystone distortion
- Intensity responses and criteria to define the pinhole size
- Pinhole mask design
- Imaging characteristics of the CLSS
- Conclusion
- System Design Description
- CLSS' configuration
- System alignment
- Process control and data acquisition
- Errors and noises in the CLSS
- Conclusion
- Data Processing and Calibrations
- Experimental Results and Discussions
- Calibrated standards
- Axial resolution beyond the FHWM
- Lateral resolution improved with a finer sampling interval
- Sampling focal-line in the CLSS
- Uncertainty in the lateral scan direction
- Aberrations in the CLSS
- The effect of tilted specimens on the axial response
- Conclusion
- Conclusions and Future Work
- Point Spread Function
- Principal planes shifting in a simple compound lens system
- Geometry Approach for Pinhole Design
- Gaussian-Lens-Equation Approach for Pinhole Design
- Bibliography