TY  - BOOK
DA  - 1991
LA  - eng
PY  - 1991
TI  - Neural Networks for Defect Recognition on Masks and Integrated Circuits: First Result
UR  - https://nbn-resolving.org/urn:nbn:de:0070-pub-22853270
Y2  - 2026-03-30T16:11:00
ER  -