Akemeier, Dieter: Nano-prototyping and 3D bioimaging with dual beam microscopy. 2012
Inhalt
- 1 Introduction
- 2 Dual beam microscopes
- 2.1 Scanning electron microscope column
- 2.2 Focused ion beam
- 2.3 Detectors
- 2.4 Gas injection systems
- 2.5 Helios NanoLab 600i
- 3 Scripting - Automated structuring with dual beam microscopes
- 4 Small scale production of high precision optical components
- 4.1 Misalignment in multi colour fluorescence imaging
- 4.2 Nanoaperture prototyping and production
- 4.2.1 Design
- 4.2.2 Materials and substrate preparation
- 4.2.3 Focused ion beam milling parameters
- 4.2.4 Scripting automatisation
- 4.2.5 Stitching routine
- 4.2.6 Process runtime improvements
- 4.2.7 Production interface
- 4.3 Results
- 4.3.1 Structuring results
- 4.3.2 Focused ion beam automation
- 4.3.3 Calibration using nanostructured shutters
- 4.4 Summary and Outlook
- 5 Focused ion beam structured nanoantennas for higher harmonic generation
- 5.1 Theoretical Background
- 5.2 Designing optical antennas for higher harmonic generation
- 5.2.1 Thermal stability
- 5.2.2 Materials for optical antennas
- 5.2.3 Sticking layers and substrate material
- 5.3 Focused ion beam structuring of optical antennas
- 5.3.1 Enhanced edge milling
- 5.3.2 Proximity Effect
- 5.3.3 Redeposition of material
- 5.3.4 Effects of scan direction
- 5.3.5 Script controlled patterning
- 5.3.6 Opening angle of the bow tie elements
- 5.3.7 Detailed patterning process
- 5.3.8 Effect of beam astigmatism
- 5.3.9 Automatisation
- 5.4 Results
- 5.4.1 Automation results
- 5.4.2 Higher harmonic measurements of focused ion beam produced nanoantennas
- 5.4.3 Thermal stability measurements
- 5.4.4 Third and higher harmonic generation
- 5.5 Summary and Outlook
- 6 Focused ion beam tomography of a mouse kidney glomerulus
- 6.1 Background
- 6.1.1 Kidney histology
- 6.1.2 Approaches to analyse and reconstruct renal tissue
- 6.1.3 Tomography with a dual beam microscope
- 6.1.4 Resolution window
- 6.2 3D reconstruction of a mouse kidney glomerulus
- 6.2.1 Tissue preparation
- 6.2.2 Micromachining and identification of glomeruli
- 6.2.3 Serial sectioning and imaging
- 6.2.4 Image processing
- 6.3 Results
- 6.3.1 Reconstruction of the overview stack
- 6.3.2 Reconstruction of the high magnification stack
- 6.3.3 Biological interpretation of the datasets
- 6.4 Summary and Outlook
- 7 Outlook
- Bibliography
- A Publications and Conferences