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    Fabrication and characterization of Si-based soft x-ray mirrors

    Schmiedeskamp, B. ; Heidemann, B. ; Kleineberg, U. ; Kloidt, A. ; Kühne, M. ; Müller, H. ; Müller, P. ; Nolting, K. ; Heinzmann, Ulrich ; Hoover, Richard B. (Ed.)
    In: X-ray EUV optics for astronomy, microscopy, polarimetry, and projection lithography, Vol. 1343, page 64-72
    1991